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    Toronto Surplus & Scientific Inc.

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    Phone: 905.853.0078
    Toll Free: 866.376.0078
    Fax: 905.853.1094

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    Kurt J. Lesker TRS3 / TRS 3A Torus 3 Axial Mount Magnetron Platform Sputter Gun, Magnetic with Manual Shutter, and Gas Tube

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    Kurt J. Lesker TRS3 / TRS 3A Torus 3 Axial Mount Magnetron Platform Sputter Gun, Magnetic with Manual Shutter, and Gas Tube


    Part Number: sku5191
    US$3,900.00
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    Quantity in Stock: 1

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    Product Description

    • 8 inch rotatable CF Flange
    • Magnetic
    • Manual Shutter
    • Gas Tube
       
    • Sputtering Power Max (intermittent): 2.0 kilowatts DC / 1.25 kilowatts RF
    • Cathode Voltage: 1000 (peak) volts
    • Discharge Current: 0 to 5 amperes
    • Operating Pressure: 5 to 200 mTorr (sources require an additional dark space shield, included, when operated above 50 mTorr)
    • Cooling Water Requirement: Flow Rate 1.0 gallon/minute, Max Input Temperature 25°C (77°F)
    • Magnets: Permanents:
    • Target (Deposition Material, not included):
      • Form: Planar
      • Diameter: 3.000"
      • Thickness - Non-magnetic 1/8" up to 1/4"standard / Magnetic 1/8" standard (contact KJLC for proper thickness of iron and iron alloy targets)
      • Cooling: Indirect
      • Magnets: Permanent
     
     

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