Product Description
- 8 inch rotatable CF Flange
- Magnetic
- Manual Shutter
- Gas Tube
- Sputtering Power Max (intermittent): 2.0 kilowatts DC / 1.25 kilowatts RF
- Cathode Voltage: 1000 (peak) volts
- Discharge Current: 0 to 5 amperes
- Operating Pressure: 5 to 200 mTorr (sources require an additional dark space shield, included, when operated above 50 mTorr)
- Cooling Water Requirement: Flow Rate 1.0 gallon/minute, Max Input Temperature 25°C (77°F)
- Magnets: Permanents:
- Target (Deposition Material, not included):
- Form: Planar
- Diameter: 3.000"
- Thickness - Non-magnetic 1/8" up to 1/4"standard / Magnetic 1/8" standard (contact KJLC for proper thickness of iron and iron alloy targets)
- Cooling: Indirect
- Magnets: Permanent
