MKS has developed structures in the sensor housing to eliminate process by-products from depositing on the surface of the diaphragm, minimizing drift. The E29B Etch Manometer is temperature controlled to 100°C, accurate to ±0.12% of Reading, and includes efficient temperature control electronics to provide superior long-term stability and repeatability. It has an optional external zero input, which accepts a voltage equal to and opposite to the zero offset, to provide a zero output at zero pressure. Based on the well-established Baratron capacitance manometer technology, the sensor’s wetted surfaces are Inconel for corrosion resistance. The modern stainless steel enclosure provides a cleanroom compatible product. 

Type: E29B

Range mmHg (Torr): 0.1

Fittings: NW16 KF

Accuracy: 0.50% (standard 100°C: 0.05, 0.25 and 0.100 Torr)

Temperature: 100°C

Option: External Zero/Vertical Calibration

Connector: 9 pin Type "D" with Thread Locks