Product Description
Flow Capacity Any Flow range from 0-5 SCCM to 0-10 SLPM (nitrogen equivalent).
Response Time (per SEMI E17-91 Settling Time) 1 to 2 Seconds
Accuracy and Linearity ±1% full scale
Repeatability Within ±0.2% full scale at any constant temperature within operating temperature range
Rangeability (Control Range)50; 1 (2%-100% full scale) (accuracy and control)
Ambient and Operating Temperature Range-10 to 70 °C ( ±14 to 158 °F)
Maximum Operating Pressure 1000 PSIG
Temperature Coefficent (per SEMI E18-91 Zero Effect and Span Effect)
±0.05% full scale / °C of zero ±0.05% of reading/ °C of span
Mounting Orientation Attitude insensitive
