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    Phone: 905.853.0078
    Toll Free: 866.376.0078
    Fax: 905.853.1094

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    Extorr XT200M Residual Gas Analyzer RGA consisting of Quadrupole Mass Analyzer + Ion Gauge + Pirani Gauge for Vacuum System

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    • Extorr XT200M Residual Gas Analyzer RGA consisting of Quadrupole Mass Analyzer + Ion Gauge + Pirani Gauge for Vacuum System

    Extorr XT200M Quadrupole Residual Gas Analyzer RGA consisting of Ion Gauge + Pirani Gauge with Electron Multiplier & More, for Vacuum System


    Part Number: sku7664
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    Product Category: VACUUM SYSTEMS 

    Product Description

    Extorr XT200M Quadrupole Residual Gas Analyzer + Ion Gauge + Pirani Gauge with Electron Multiplier, USB to Serial Converter, Power Adapter and RS232 Cable

    1 to 200 amu

    Resolution:
    Greater than 1 amu @ 10% peak height, adjustable

    Operating pressure
    Atmosphere to UHV ( ion gauge operation below 10-2 torr, RGA operation below 10-3 torr and Multiplier operation below 10-6 torr)

    Partial Pressure Detector type
    Faraday cup

    Partial Pressure Sensitivity (A/Torr)
    5x10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and 2 mA electron emission current.


    Minimum detectable partial pressure
    5x10-14 torr with Multiplier. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy, and 2 mA electron emission current. 10-11 torr with Faraday cup.

    Total Pressure Detector type  >10-3 Torr
    Pirani type, (measures heat loss from noble metal wire)

    Total Pressure Detector type <10-3 Torr 
    Bayard/Alpert type ion gauge, x-ray limit 10-9

    CCU Max. operating temperature
    70°C

    CCU temperature sensor
    solid state sensor in CCU, temperature continuously monitored and displayed

    Bakeout temperature
    350°C (without CCU)

    Probe operating temperature
    100°C,  Platinum RTD on probe, temperature continuously monitored and displayed

    Ionizer Design
    Open ion source , electron impact ionization.

    Probe Materials
    SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel

    Filament
    Dual Thoriated Iridium with firmware protection.

    Degas
    Built-in 1 to 30 W ramp-upBuilt-in 1 to 30 W ramp-upBuilt-in 1 to 30 W ramp-up

    Electron energy
    10 to 150 V, continuously programmable 

    Ion energy
    3 to 10 V, continuously programmable

    Electron emission current
    0.1 to 5 mA, continuously programmable

    Probe mounting
    Minimum tube I.D. 1.375"  flange 2.75" CF

    CCU dimensions
    3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout

    Mass stability
    ±0.1 amu after 30 minutes warmup.

    Power requirement
    24 VDC @ 2.1 Amps. Standard  

    Weight: 5lbs

    * Includes Power Adapter and RS232 cable

     

     
     

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