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Extorr XT200M Residual Gas Analyzer RGA consisting of Quadrupole Mass Analyzer + Ion Gauge + Pirani Gauge for Vacuum System

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  • Extorr XT200M Residual Gas Analyzer RGA consisting of Quadrupole Mass Analyzer + Ion Gauge + Pirani Gauge for Vacuum System

Extorr XT200M Quadrupole Residual Gas Analyzer RGA consisting of Ion Gauge + Pirani Gauge with Electron Multiplier & More, for Vacuum System


Part Number: sku7664
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Product Category: VACUUM SYSTEMS 

Product Description

Extorr XT200M Quadrupole Residual Gas Analyzer + Ion Gauge + Pirani Gauge with Electron Multiplier, USB to Serial Converter, Power Adapter and RS232 Cable

1 to 200 amu

Resolution:
Greater than 1 amu @ 10% peak height, adjustable

Operating pressure
Atmosphere to UHV ( ion gauge operation below 10-2 torr, RGA operation below 10-3 torr and Multiplier operation below 10-6 torr)

Partial Pressure Detector type
Faraday cup

Partial Pressure Sensitivity (A/Torr)
5x10-4 into Faraday cup. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy and 2 mA electron emission current.


Minimum detectable partial pressure
5x10-14 torr with Multiplier. Measured with N2 @ 28 amu with 1 amu full peak width, 10% height, 70 eV electron energy, 6 eV ion energy, and 2 mA electron emission current. 10-11 torr with Faraday cup.

Total Pressure Detector type  >10-3 Torr
Pirani type, (measures heat loss from noble metal wire)

Total Pressure Detector type <10-3 Torr 
Bayard/Alpert type ion gauge, x-ray limit 10-9

CCU Max. operating temperature
70°C

CCU temperature sensor
solid state sensor in CCU, temperature continuously monitored and displayed

Bakeout temperature
350°C (without CCU)

Probe operating temperature
100°C,  Platinum RTD on probe, temperature continuously monitored and displayed

Ionizer Design
Open ion source , electron impact ionization.

Probe Materials
SS304, Kovar, Tungsten, Alumina, Iridium, Copper, Nickel

Filament
Dual Thoriated Iridium with firmware protection.

Degas
Built-in 1 to 30 W ramp-upBuilt-in 1 to 30 W ramp-upBuilt-in 1 to 30 W ramp-up

Electron energy
10 to 150 V, continuously programmable 

Ion energy
3 to 10 V, continuously programmable

Electron emission current
0.1 to 5 mA, continuously programmable

Probe mounting
Minimum tube I.D. 1.375"  flange 2.75" CF

CCU dimensions
3.3" x 4.8"x 7.5". Easily separated from the probe for bakeout

Mass stability
±0.1 amu after 30 minutes warmup.

Power requirement
24 VDC @ 2.1 Amps. Standard  

Weight: 5lbs

* Includes Power Adapter and RS232 cable

 

 
 

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