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Porter 201-ASASVBAG Mass Flow Controller 2SLPM, 21.1 DC, Argon, 55PSIG
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By PP Systems
<p>Flow Capacity Any Flow range from 0-5 SCCM to 0-10 SLPM (nitrogen equivalent). Response Time (per SEMI E17-91 Settling Time) 1 to 2 Seconds Accuracy and Linearity ±1% full scale Repeatability Within ±0.2% full scale at any constant temperature within operating temperature range Rangeability (Cont…
Description
<p>Flow Capacity Any Flow range from 0-5 SCCM to 0-10 SLPM (nitrogen equivalent).
Response Time (per SEMI E17-91 Settling Time) 1 to 2 Seconds
Accuracy and Linearity ±1% full scale
Repeatability Within ±0.2% full scale at any constant temperature within operating temperature range
Rangeability (Control Range)50; 1 (2%-100% full scale) (accuracy and control)
Ambient and Operating Temperature Range-10 to 70 °C ( ±14 to 158 °F)
Maximum Operating Pressure 1000 PSIG
Temperature Coefficent (per SEMI E18-91 Zero Effect and Span Effect)
±0.05% full scale / °C of zero ±0.05% of reading/ °C of span
Mounting Orientation Attitude insensitive
 </p>
Response Time (per SEMI E17-91 Settling Time) 1 to 2 Seconds
Accuracy and Linearity ±1% full scale
Repeatability Within ±0.2% full scale at any constant temperature within operating temperature range
Rangeability (Control Range)50; 1 (2%-100% full scale) (accuracy and control)
Ambient and Operating Temperature Range-10 to 70 °C ( ±14 to 158 °F)
Maximum Operating Pressure 1000 PSIG
Temperature Coefficent (per SEMI E18-91 Zero Effect and Span Effect)
±0.05% full scale / °C of zero ±0.05% of reading/ °C of span
Mounting Orientation Attitude insensitive
 </p>