Home›Products›Vacuum Equipment & Systems›Vacuum Sources›FEI 83-2LI / 1D2 Two Lens, Post Lens Deflection Ion Focusing Column / FIB Focused Ion Beam
FEI 83-2LI / 1D2 Two Lens, Post Lens Deflection Ion Focusing Column / FIB Focused Ion Beam
sku54551 — low stock
$7,500.00CAD
By FEI
<p>The FEI Two Lens, Post Lens Deflection focused ion beam package consists of a Liquid Metal Ion electrostatic gun, a Model 2LI power supply and a Model 1D2 Deflection Controller. This versatile and reliable ion gun can become the cornerstone of a system for high resolution ion microscopy, SMS micr…
Description
<p>The FEI Two Lens, Post Lens Deflection focused ion beam package consists of a Liquid Metal Ion electrostatic gun, a Model 2LI power supply and a Model 1D2 Deflection Controller. This versatile and reliable ion gun can become the cornerstone of a system for high resolution ion microscopy, SMS microscopy or micro-machining at sub-micron tolerances. This gun is compact, fits on a Conflat flange, has an energy range of 5keV to 25keV and can be operated in either a horizontal or vertical position(or anything in between). Fabricated from material compatible with UHV, the ion focusing column can be sealed to the vacuum system with either a copper or elastomer gasket. It should be operated a source region pressures of 5x10-7 Torr or less.</p><ul text-align:="" style="list-style-position:">FOCUSING COLUMN SPECIFICATIONS:
<li>Model: 83-2LI</li><li>CF Flange Size: 4 1/2"</li><li>Ion Source: Gallium Liquid Metal Ion Field Emitter</li><li>Beam Energy: 0-25keV</li><li>Beam Current: 60 picoampers to 4 nanoampers</li><li>Beam Current Density: To 2.5A/cm2</li><li>Beam Spot Size: 60 nanometers to 5 microns</li><li>Field of View: 2 microns to 1.0mm</li><li>Working Distance: 15mm to 75mm</li><li>Bakable: To 200C'
HIGH VOLTAGE POWER SUPPLY SPECIFICATIONS:</li><li>Model: 2LI</li><li>Beam Energy: 0kV-25kV</li><li>Filament Heater Current: 0-5Amps DC</li><li>Suppressor Voltage: 0 to -2kV</li><li>Extraction Voltage: 0 to -15kV</li><li>Power Requirement: 115VAC 50/60Hz
OCTUPOLE STIGMATOR/DEFLECTOR SPECIFICATIONS:</li><li>Model: 1D2</li><li>Raster Input: +/- 5 volts for full beam deflection</li><li>Blanking Input: Manually or by External Signal Input</li><li>Magnification: 100X to 100000X at standard working distance</li></ul><p>It comes with all of the interconnect cables to go from the controller to the Ion Focusing Column
PLUS we have the User and Setup manuals along with the wiring schematics!!"</p>
<li>Model: 83-2LI</li><li>CF Flange Size: 4 1/2"</li><li>Ion Source: Gallium Liquid Metal Ion Field Emitter</li><li>Beam Energy: 0-25keV</li><li>Beam Current: 60 picoampers to 4 nanoampers</li><li>Beam Current Density: To 2.5A/cm2</li><li>Beam Spot Size: 60 nanometers to 5 microns</li><li>Field of View: 2 microns to 1.0mm</li><li>Working Distance: 15mm to 75mm</li><li>Bakable: To 200C'
HIGH VOLTAGE POWER SUPPLY SPECIFICATIONS:</li><li>Model: 2LI</li><li>Beam Energy: 0kV-25kV</li><li>Filament Heater Current: 0-5Amps DC</li><li>Suppressor Voltage: 0 to -2kV</li><li>Extraction Voltage: 0 to -15kV</li><li>Power Requirement: 115VAC 50/60Hz
OCTUPOLE STIGMATOR/DEFLECTOR SPECIFICATIONS:</li><li>Model: 1D2</li><li>Raster Input: +/- 5 volts for full beam deflection</li><li>Blanking Input: Manually or by External Signal Input</li><li>Magnification: 100X to 100000X at standard working distance</li></ul><p>It comes with all of the interconnect cables to go from the controller to the Ion Focusing Column
PLUS we have the User and Setup manuals along with the wiring schematics!!"</p>